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Technique
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Description
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Typical Application
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Sample Types
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Working Range
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HR-ICPMS
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High Resolution Inductively Coupled Plasma Mass Spectrometer
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Identify and measure trace metals in aqueous samples
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VPD samples, ultra pure water, process chemicals, material extracts, chemical waste streams
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ppt to ppb
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VPD
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Vapor Phase Decomposition
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Collection process used to identify and measure trace metals on wafer surfaces.
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Silicon wafers, hydrofluoric acid soluble thin films
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E6 to E14 atoms/cm2
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GeMeTec WSPS with PAD-Fume and PAD-Scan
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Gemetec Wafer Surface Preparation System with Programmable Automated Decomposition Fumer and Programmable Automated Droplet Scanner
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Automated VPD prep tool. Wafers are handled by robot in ULPA filtered class 10 environment and transferred from cassette stand to fuming module to scanning module.
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Silicon wafers, hydrofluoric acid soluble thin films
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E6 to E14 atoms/cm2
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ICPOES
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Inductively Coupled Plasma Optical Emission Spectrometer
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identify and measure trace metals in aqueous samples
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water, chemicals, material extracts, slurries, chemical waste streams
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ppb to ppm
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WDXRF
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Wavelength Dispersive X-Ray Fluorescence Spectrometer
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qualitative and quantitative elemental analysis of solid materials
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Identify unknowns, elemental bulk analysis, thin films composition, contaminant studies
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ppm to wt%
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FTIR
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Micro Fourier Transform Infrared Spectrometer
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identification of organic and inorganic compounds
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Identify molecular composition of organic materials and polymers, characterize thin films, analyze non-reactive gases
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wt%
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ATD-GC-MS
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Thermal Desorb Gas Chromatograph Mass Spectrometer
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qualitative and quantitative analysis of organic compounds and mixtures
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solvents, air samples, process chemicals, water, polymers, wafers
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ppb to wt%
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IC
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Ion Chromatography
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Aqueous ionics measurements
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anions and cations in UPW, diluted chemicals, material extracts
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ppb to ppm
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TOC
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Total Organic Carbon Analyzer
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inorganic and organic carbon determinations in aqueous samples
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water, water extracts
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0.1 to 10ppm
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Auto-Titrator
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Potentiometry based autotitration systems
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acid/base/chemical assays water content in organic solvents
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process chemicals, cleaning baths, chemicals waste streams
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0.1 to 10ppm
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