SIMS (Secondary Ion Mass Spectrometry)

The magnetic SIMS instrument uses high energy beams (1KeV to 15KeV) with a high extraction field to provide fast sputter rate and high sensitivity depth profiling. Major applications are: trace element contamination analysis in the bulk film and surface; implant characterization; device dopant characterization with minimum size of 100umX100um; film composition analysis.

Instruments:
• Cameca 6f dynamic magnetic sector SIMS system